Methods and apparatus for insitu analysis of gases in electronic device fabrication systems

ABSTRACT

Systems and methods are disclosed that include adjusting a pressure level of a sample gas in a testing chamber, for example, using a pressurized inert reference gas, and determining a composition of the adjusted sample gas. By adjusting the pressure level of the sample gas, the composition of the sample gas may be determined more accurately than otherwise possible. Numerous other aspects are disclosed.

This application is a division of, and claims priority to, United StatesNon-Provisional patent application Ser. No. 11/830,832, filed Jul. 30,2007, and titled, “METHODS AND APPARATUS FOR INSITU ANALYSIS OF GASES INELECTRONIC DEVICE FABRICATION SYSTEMS” (Attorney Docket No. 10330),which claims priority to United States Provisional Patent ApplicationSer. No. 60/820,958 filed Jul. 31, 2006, and entitled “METHODS ANDAPPARATUS FOR INSITU ANALYSIS OF GASES IN ELECTRONIC DEVICE FABRICATIONSYSTEM” (Attorney Docket No. 10330/L). Both of these patent applicationsare hereby incorporated by reference herein in their entirety for allpurposes.

FIELD OF THE INVENTION

The present invention relates generally to electronic device fabricationmethods and systems, and is more particularly concerned with insituspectrographic analysis of gases in such systems.

BACKGROUND OF THE INVENTION

Electronic device fabrication methods and systems typically involve theuse of various process gases and the creation of a number ofby-products. In order to understand the processes better and to monitorthe processes more closely, a sample of the process gases may be taken.However, such a sample may only reveal limited information about anoverall process. Thus, what is needed are methods and apparatus thatprovide more complete and detailed information about process gases.

SUMMARY OF THE INVENTION

In some aspects of the invention, a method is provided that includesadjusting a pressure level of a sample gas; and determining acomposition of the adjusted sample gas.

In other aspects of the invention, an apparatus for testing a sample gasis provided that includes a chamber adapted to contain a gas to betested; a fitting coupled to the chamber and adapted to deliver a samplegas to the chamber; and a controller adapted to adjust a pressure levelof the sample gas in the chamber.

In yet other aspects of the invention, a system for testing a sample gasis provided that includes a processing tool having a plurality ofisolatable spaces containing gases to be tested; a chamber adapted tocontain a sample gas to be tested; a fitting for selectively couplingthe chamber to the plurality of spaces; and a controller adapted toadjust a pressure level of the sample gas in the chamber.

Other features and aspects of the present invention will become morefully apparent from the following detailed description of exemplaryembodiments, the appended claims and the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic block diagram depicting an example embodimentaccording to some aspects of the present invention.

FIG. 2 is a flowchart depicting an example method embodiment associatedwith the example apparatus of FIG. 1 according to some aspects of thepresent invention.

FIG. 3 is a schematic block diagram depicting a second exampleembodiment according to some aspects of the present invention.

FIGS. 4A and 4B together are a flowchart depicting an example methodembodiment associated with the example apparatus of FIG. 3 according tosome aspects of the present invention.

FIG. 5 is a schematic block diagram depicting a third example embodimentaccording to some aspects of the present invention.

FIGS. 6A and 6B together are a flowchart depicting an example methodembodiment associated with the example apparatus of FIG. 5 according tosome aspects of the present invention.

DETAILED DESCRIPTION

The present invention provides systems and methods for performinganalysis (e.g., infra read (IR) spectroscopy) on gases used or createdin electronic device fabrication methods and systems. The methods andapparatus of the present invention facilitate analysis of gas samplestaken from several locations within an electronic device fabricationsystem. Further the present invention provides methods of integratingone or more gas composition measurement devices into an electronicdevice fabrication system. For example, according to some embodiments ofthe present invention, an IR spectrophotometer may be coupled to anumber of chambers and loadlocks of an electronic device fabricationsystem via a low pressure manifold that is operative to separatelydirect the flow of various gas samples to a sample cell of the IRspectrophotometer. Because IR spectroscopy may only be accurate athigher pressures (e.g., >100 Torr) and the process gases may be at lowerpressures (e.g., <100 Torr) within the sample sites, the presentinvention further provides methods and apparatus to pressurize thesample gases to within a suitable range and in a controlled manner sothat the composition and concentrations of the constituent parts of thesampled gases may be accurately determined.

The present invention may be useful for a number of different purposes.During the manufacture of an electronic device (e.g., a semiconductordevice), various processes are performed which may contaminate spaces(e.g., process chamber, transfer chamber, load lock, factory interface,clean room, etc.) in which processing is conducted or through whichmanufactured articles are passed. For example, deposition species,deposition by-products, etchant, process gases, etc., may contaminatethe spaces. Accordingly, in some embodiments, the present invention maybe employed to determine a contamination level within a space. Further,if a process does not work as expected, the present invention may beemployed to help determine what actually happened during the process sothat the process may be corrected or improved. In addition, many wasteabatement processes (e.g., methods of processing or neutralizing toxicby-products) may be improved or optimized with more accurate informationregarding the composition of the waste gases. Thus, the presentinvention may be employed to determine the composition of the wastegases to improve abatement processes. The present invention may havemany other applications than the examples listed above.

Turning to FIG. 1, a schematic view of a system 100 which may be used toanalyze a sample gas (e.g., exhaust gas) from a space (e.g., processchamber, load lock, transfer chamber, etc.) in accordance with anexemplary embodiment of the present invention is depicted. In someembodiments of the present invention, the sample gas may be analyzed todetermine a contamination level within the space. The system 100 mayinclude a fitting 102 (e.g., a low pressure manifold which may include aplurality of normally closed valves and a one way check valve) operativeto selectively, fluidly couple a sample cell within a measurement device104 (e.g., an IR spectrophotometer) to various spaces such as, forexample, one or more process chambers 106, one or more load locks 108,one or more transfer chambers 110 (only one shown), or the like. Each ofthe spaces may include an associated port (e.g., a valve) 112 to 122 aspart of the fitting 102. In some embodiments of the present invention,the fitting 102 may be selectively, fluidly coupled with any number ofspaces. The system 100 may also include a supply 124 (e.g., inertreference gas such as N₂) and a purifier 126 in fluid communication withthe sample cell of the measurement device 104. The system 100 may alsoinclude a pressure monitoring device 128 (e.g., a transducer), a vacuumsource 130, a purge supply 132, and an adjustable orifice 134 (e.g., avariable flow valve) operatively coupled with an outlet of the samplecell of the measurement device 104.

The various components may each be operatively coupled to (e.g.,electrically) and operated under the control of a controller 136.Although these couplings are not depicted for clarity, the connectionbetween the controller 136 and the pressure monitoring device 128; andthe controller and the adjustable orifice 134 are shown. As will beexplained in more detail below, the pressure monitoring device 128 isoperative to provide (e.g., feedback) gas pressure information withinthe sample cell of the measurement device 104 to the controller 136. Thecontroller is operative to adjust the adjustable orifice 134 to controlthe pressure within the sample cell of the measurement device 104.

Turning to FIG. 2, an example method 200 of the present invention isdepicted. In step 202, the sample cell of the measurement device 104 maybe evacuated by selectively coupling (e.g., opening a valve) the vacuumsource 130 to the sample cell of the measurement device 104. In someembodiments, the sample cell of the measurement device 104 may be purgedwith inert gas (e.g., N₂) before the evacuation step. In other words,the sample cell of the measurement device 104 may be purged byselectively coupling (e.g., opening a valve) the purge supply 132 to thesample cell of the measurement device 104 before the evacuation step202. In step 204, the controller may select a space 106, 108, 110 fromwhich to sample gas. In step 206, the fitting 102 may be operated tocause the selected gas to flow to the sample cell of the measurementdevice 104. The selected sample gas may flow on its own at a lowpressure (e.g., <100 Torr) and/or the selected sample gas may be drawnby the vacuum source 130. Once the sample cell is filled with theselected sample gas at the low pressure level indicated by the pressuremonitoring device 128, the sample cell may be isolated in step 208 byclosing off the inlet and outlet valves of the sample cell. In step 210,the composition and pressure of the gas in the sample cell may bemeasured and recorded.

In step 212, pressurized inert reference gas from the supply 124 isadded to the sample cell to raise the pressure in the sample cell to arange suitable for accurate measurement of gas composition, for example,using an IR spectrophotometer. The variable orifice 134, under thecontrol of the controller 136, is used to control the pressure withinthe sample cell. Once the desired pressure range (e.g., >100 Torr) isachieved as indicated to the controller 136 by the pressure monitor 128,in step 214, the sample cell is again isolated (e.g., the inlet andoutlet valves are closed). In step 216, the composition and pressure ofthe combination of the sample gas and the reference gas in the samplecell is measured. In step 218, the actual composition of the sample gasis calculated based upon the measured values determined in steps 210 and216 (e.g., the composition of the sample gas alone is determined byadjusting for the added reference gas). In step 220, the controller 136determines if there are additional sample gases to analyze. If thereare, control flows back to step 202 where the method 200 is repeated forthe remaining sample gases. If sample gas from each of spaces 106, 108,110 has been analyzed, the method 200 ends after step 220.

Turning to FIGS. 3, 4A, and 4B, an alternative embodiment of a system300 and method 400 according to some embodiments of the presentinvention is depicted. In the system 300 of FIG. 3, a booster pump 302coupled between the fitting 102 and the sample cell of the measurementdevice 104 is used to pressurize the selected sample gas (e.g., insteadof the pressurized reference inert gas supply used in the system 100depicted in FIG. 1). As with the embodiment of FIG. 1, the variableorifice 134, under the control of the controller 136, is used to controlthe pressure within the sample cell. Once the desired pressure range(e.g., >100 Torr) is achieved as indicated to the controller 136 by thepressure monitor 128, the sample cell is isolated (e.g., the inlet andoutlet valves are closed). Thus in the method 400 and system 300 ofFIGS. 4 and 3, respectively, feedback from the pressure monitor 128 isused to control the variable orifice 134.

In step 402 of the example method 400, a sample cell (e.g., a samplechamber of spectrophotometer 104) is evacuated. In step 404, acontroller 136 (or user) selects a next space whose gas is to be tested.In step 406, a manifold (e.g., fitting 102 (FIG. 3)) is used to flow thesample gas from the selected space through the booster pump 302 to thesample cell. A variable orifice 134 is used to maintain low pressure(e.g., a pressure related or equal to the pressure in the space to betested). In step 408, the composition and pressure of the sample gas ismeasured in the sample cell. In step 410, based on feedback from apressure monitor, the variable orifice is adjusted (while the boosterpump continues to operate at a fixed rate) to adjust (e.g., increase)the sample gas pressure in the sample chamber. In step 412, the pressurein the sample chamber is monitored. In step 414, a determination is madewhether the pressure has reached a level suitable for accuratedetermination of the sample gas composition. If it has not, flowproceeds back to step 410. If it has, in step 416, the sample cell isisolated (e.g., the inlet and outlet (e.g., variable orifice) areclosed) and the booster pump is shut down. In step 418, the compositionand pressure of the sample gas is again measured in the sample cell. Instep 420, a determination is made whether there are additional spaceswith gas to be analyzed. If so, flow returns to step 402. Otherwise themethod 400 ends.

Turning to FIGS. 5, 6A, and 6B, an alternative embodiment of a system500 and method 600 according to some embodiments of the presentinvention is depicted. In the system 500 of FIG. 5, an adjustablebooster pump 502 coupled between the fitting 102 and the sample cell ofthe measurement device 104, is used to pressurize the selected samplegas (e.g., instead of the pressurized reference inert gas supply used inthe system 100 depicted in FIG. 1 or the booster pump 302 and variableorifice 134 of the system 300 depicted in FIG. 3). The adjustablebooster pump 502, under the control of the controller 136, is used tocontrol the desired pressure within the sample cell. Once the desiredpressure range (e.g., >100 Torr) is achieved as indicated to thecontroller 136 by the pressure monitor 128, the sample cell is isolated(e.g., the inlet and outlet valves are closed). Thus in the method 600and system 500 of FIGS. 6A & 6B and 5, respectively, feedback from thepressure monitor 128 is used to control the adjustable booster pump 502.

In step 602 of the example method 600, a sample cell (e.g., a samplechamber of spectrophotometer 104) is evacuated. In step 604, acontroller 136 (or user) selects a next space whose gas is to be tested.In step 606, a manifold (e.g., fitting 102 (FIG. 5)) is used to flow thesample gas from the selected space through a variable speed (e.g.,adjustable) booster pump 502 to the sample cell. A variable speed (e.g.,adjustable) booster pump 502 is used to maintain low pressure (e.g., apressure related or equal to the pressure in the space to be tested). Instep 608, the sample cell is isolated, for example, by closing theinlets and outlets. In step 610, the composition and pressure of thesample gas is measured in the sample cell. In step 612, based onfeedback from a pressure monitor 128 for example, operation of thevariable speed booster pump is adjusted to adjust (e.g., increase) thesample gas pressure in the sample chamber. In step 614, the pressure inthe sample chamber is monitored. In step 616, a determination is madewhether the pressure has reached a level suitable for accuratedetermination of the sample gas composition. If it has not, flowproceeds back to step 612. If it has, in step 618, the sample cell isisolated (e.g., the inlet and outlet are closed) and the booster pump isshut down. In step 620, the composition and pressure of the sample gasis again measured in the sample cell. In step 622, a determination ismade whether there are additional spaces with gas to be analyzed. If so,flow returns to step 602. Otherwise the method 600 ends.

The foregoing description discloses only particular embodiments of theinvention; modifications of the above disclosed methods and apparatuswhich fall within the scope of the invention will be readily apparent tothose of ordinary skill in the art.

Accordingly, while the present invention has been disclosed inconnection with specific embodiments thereof, it should be understoodthat other embodiments may fall within the spirit and scope of theinvention, as defined by the following claims.

1. A method for testing a sample gas comprising: adjusting a pressurelevel of a sample gas; and determining a composition of the adjustedsample gas; wherein the adjusting includes adjusting the pressure levelfrom a low pressure at which measurement by spectroscopy would not beaccurate to a higher pressure within a high enough suitable range atwhich the composition of the sample gas is capable of being accuratelydetermined by spectroscopy; and wherein adjusting the pressure levelincludes adding additional sample gas to the sample gas in a closedchamber.
 2. The method of claim 1 wherein adjusting the pressure levelincludes controlling a booster pump and a variable outlet orifice. 3.The method of claim 1 wherein adjusting the pressure level includescontrolling an adjustable booster pump supplying additional sample gas.4. The method of claim 3 wherein controlling the adjustable booster pumpfurther comprises: receiving feedback from a pressure monitor.
 5. Themethod of claim 4 further comprising: adjusting operation of theadjustable booster pump based on the feedback.
 6. The method of claim 1wherein adjusting the pressure level includes controlling a variableoutlet orifice.
 7. The method of claim 6 further comprising: isolatingthe sample cell once a desired pressure range is achieved.
 8. The methodof claim 1 wherein determining a composition of the adjusted sample gasincludes measuring a pressure of the sample gas before and after thepressure level of the sample gas is adjusted.
 9. The method of claim 8further comprising: determining whether the measured pressure hasreached a level suitable for accurate determination of the sample gascomposition.
 10. An apparatus for testing a sample gas comprising: achamber adapted to contain a gas to be tested; a fitting coupled to thechamber and adapted to deliver a sample gas to the chamber; and acontroller adapted to adjust a pressure level of the sample gas in thechamber; wherein the adjustment includes adjusting the pressure levelfrom a low pressure at which measurement by spectroscopy would not beaccurate to a higher pressure within a high enough suitable range atwhich a composition of the sample gas is capable of being accuratelydetermined by spectroscopy; and wherein the controller is coupled to asample gas supply.
 11. The apparatus of claim 10 wherein the controllerincludes a booster pump.
 12. The apparatus of claim 10 wherein thecontroller includes an adjustable booster pump.
 13. The apparatus ofclaim 10 wherein the controller includes a variable outlet orifice. 14.The apparatus of claim 10 wherein the controller is coupled to apressure monitor.
 15. The apparatus of claim 14 wherein the pressuremonitor is adapted to provide feedback to the controller regarding thepressure level.
 16. A system for testing sample gases comprising: aprocessing tool having a plurality of isolatable spaces containing gasesto be tested; a chamber adapted to contain a sample gas to be tested; afitting for selectively coupling the chamber to the plurality of spaces;and a controller adapted to adjust a pressure level of the sample gas inthe chamber; wherein the adjustment includes adjusting the pressurelevel from a low pressure at which measurement by spectroscopy would notbe accurate to a higher pressure within a high enough suitable range atwhich a composition of the sample gas is capable of being accuratelydetermined by spectroscopy; and wherein the controller is coupled to asample gas supply.
 17. The system of claim 16 wherein the controllerincludes a booster pump.
 18. The system of claim 16 wherein thecontroller includes an adjustable booster pump.
 19. The system of claim16 wherein the controller includes a variable outlet orifice.
 20. Thesystem of claim 16 wherein the controller is coupled to a pressuremonitor; and wherein the pressure monitor is adapted to provide feedbackto the controller regarding the pressure level.